Why The World Relies On ASML For Machines That Print Chips
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报道沿着极紫外光从光源到晶圆的路径,解释为何要抽真空并精密制造反射镜。缩短曝光波长还改变了整条路线能把多少光真正送到晶圆。
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the entire process has to happen in a vacuumonly about 5% of the photons reach the actual wafer